- 专利标题： MEMS DEVICE WITH OFFSET ELECTRODE
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申请号： US15700179申请日： 2017-09-11
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公开(公告)号： US20180079640A1公开(公告)日： 2018-03-22
- 发明人: Christopher S. GUDEMAN , Marin Sigurdson
- 申请人： Innovative Micro Technology
- 申请人地址： US CA Goleta
- 专利权人： Innovative Micro Technology
- 当前专利权人： Innovative Micro Technology
- 当前专利权人地址： US CA Goleta
- 主分类号： B81B3/00
- IPC分类号： B81B3/00 ; B81B7/00 ; B81C1/00
摘要：
Systems and methods for forming an electrostatic MEMS switch that is used to switch a source of current or voltage. At least one surface of the MEMS switch may be rotated on approach to another substrate, such that when the surfaces are separated, the forces are shearing forces rather than static frictional forces.