Invention Application
- Patent Title: METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
-
Application No.: US15640493Application Date: 2017-07-01
-
Publication No.: US20180082977A1Publication Date: 2018-03-22
- Inventor: Yuki YAGYU
- Applicant: Renesas Electronics Corporation
- Priority: JP2016-181845 20160916
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L23/495 ; H01L23/31

Abstract:
Reliability of a semiconductor device is improved.A wire bonding step includes a step of exposing a wire and a pad electrode to a reducing gas atmosphere, forming a first hydroxyl layer on a surface of a ball portion, and forming a second hydroxyl layer on a surface of the pad electrode, a first bonding step of temporarily joining the ball portion to the pad electrode through the first hydroxyl layer and the second hydroxyl layer, and after the first bonding step, a step of actually joining the ball portion to the pad electrode by performing a heat treatment on a semiconductor chip and a base material.
Public/Granted literature
- US09972598B2 Method of manufacturing semiconductor device Public/Granted day:2018-05-15
Information query
IPC分类: