- 专利标题: GAS SENSOR AND METHOD OF MANUFACTURE THEREOF
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申请号: US15715564申请日: 2017-09-26
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公开(公告)号: US20180088073A1公开(公告)日: 2018-03-29
- 发明人: Eui Hyun Ryu , Peter Trefonas, III , Bok-Hee Lee
- 申请人: Rohm and Haas Electronic Materials LLC , Rohm and Haas Electronic Materials Korea Ltd.
- 主分类号: G01N27/407
- IPC分类号: G01N27/407 ; H01L41/113 ; G01N33/00 ; G01N29/02
摘要:
Disclosed herein is a gas sensor comprising a substrate; a first polymeric layer having a first surface and a second surface disposed on the substrate; where the first surface contacts the substrate and where the second surface is opposed to the first surface and has a higher surface area than the first surface; where the first polymeric layer comprises repeat units that have a deprotected hydrogen donor; and a second polymeric layer disposed on the first polymeric layer; where the second polymeric layer is derived from a repeat unit that comprises a hydrogen acceptor.