- 专利标题: SENSITIZED, PHOTO-SENSITIVE GLASS AND ITS PRODUCTION
-
申请号: US15821963申请日: 2017-11-24
-
公开(公告)号: US20180093918A1公开(公告)日: 2018-04-05
- 发明人: Bianca Schreder , Marten Walther , Martin Feichtinger , Lothar Niessner , Carsten Renz , Sean Qian , Junming Xue
- 申请人: SCHOTT AG
- 申请人地址: DE Mainz
- 专利权人: SCHOTT AG
- 当前专利权人: SCHOTT AG
- 当前专利权人地址: DE Mainz
- 优先权: DE102015107777.9 20150518; DE102015107778.7 20150518; DE102016101996.8 20160204
- 主分类号: C03C10/00
- IPC分类号: C03C10/00 ; C03C4/04 ; C03B27/012 ; C03B32/02
摘要:
A sensitized, photo-structurable glasses and methods for producing are provided. The glasses includes Si4+, one or more crystal-agonist, one or more crystal-antagonist, and one or more pair of nucleating agents. The glasses are sensitized in that the glass reacts more sensitive to irradiation with UV-light and can be crystallized easier and with higher aspect ratios than a non-sensitized glass with equal composition. Furthermore, the sensitized glasses of this invention have smaller crystal sizes after irradiation and tempering than a non-sensitized glass with equal composition. The invention also relates to a structured glass product. Such product can be obtained by submitting the crystallized glass product to a subsequent etching step. The structured product can be used in components or as component for the application fields micro-technology, micro-reaction-technology, electronic packaging, micro-fluidics, FED spacer, bio-technology, interposer, and/or three-dimensional structured antennae.
公开/授权文献
- US10472273B2 Sensitized, photo-sensitive glass and its production 公开/授权日:2019-11-12
信息查询