Invention Application
- Patent Title: FREQUENCY MODULATION MEMS TRIAXIAL GYROSCOPE
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Application No.: US15639608Application Date: 2017-06-30
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Publication No.: US20180112981A1Publication Date: 2018-04-26
- Inventor: Alessandro TOCCHIO , Luca Giuseppe FALORNI , Claudia COMI , Valentina ZEGA
- Applicant: STMICROELECTRONICS S.R.L. , Politecnico di Milano
- Priority: IT102016000106928 20161024
- Main IPC: G01C19/5747
- IPC: G01C19/5747 ; G01C19/5769

Abstract:
A frequency modulation MEMS triaxial gyroscope, having two mobile masses; a first and a second driving body coupled to the mobile masses through elastic elements rigid in a first direction and compliant in a second direction transverse to the first direction; and a third and a fourth driving body coupled to the mobile masses through elastic elements rigid in the second direction and compliant in the first direction. A first and a second driving element are coupled to the first and second driving bodies for causing the mobile masses to translate in the first direction in phase opposition. A third and a fourth driving element are coupled to the third and fourth driving bodies for causing the mobile masses to translate in the second direction and in phase opposition. An out-of-plane driving element is coupled to the first and second mobile masses for causing a translation in a third direction, in phase opposition. Movement-sensing electrodes generate frequency signals as a function of external angular velocities.
Public/Granted literature
- US10520315B2 Frequency modulation MEMS triaxial gyroscope Public/Granted day:2019-12-31
Information query
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