- 专利标题： MICROELECTRONIC STRUCTURES WITH SUSPENDED LITHIUM-BASED THIN FILMS
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申请号： US15857323申请日： 2017-12-28
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公开(公告)号： US20180123016A1公开(公告)日： 2018-05-03
- 发明人: Songbin Gong , Gianluca Piazza
- 申请人： CARNEGIE MELLON UNIVERSITY
- 主分类号： H01L41/047
- IPC分类号： H01L41/047 ; H03H9/13 ; H03H9/02 ; H03H3/02 ; H01L41/313 ; H01L41/187 ; H01L41/332
摘要：
In one aspect, a microelectronic device comprises: a suspended lithium-based thin film; and one or more electrodes disposed on the suspended lithium-based thin film, wherein the one or more electrodes comprises one or more fingers, and a width of at least one outer finger of the one or more fingers is smaller than a width of at least one inner finger of the one or more fingers.
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