发明申请
- 专利标题: EXTERNAL PLASMA SYSTEM
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申请号: US15571478申请日: 2016-04-29
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公开(公告)号: US20180130639A1公开(公告)日: 2018-05-10
- 发明人: Michael Nicholas Vranich , Paul Frederick Smith
- 申请人: Michael Nicholas Vranich , Paul Frederick Smith
- 国际申请: PCT/US2016/030235 WO 20160429
- 主分类号: H01J37/32
- IPC分类号: H01J37/32 ; H05H1/46
摘要:
Methods and systems for generating a plasma using an external plasma system are described. The plasma system may include an energy coupling device (e.g., an electromagnetic coil or capacitor) that is submersed within a liquid coolant and powered by an RF source. In some embodiments, a C-shaped magnetic core may be submersed within the liquid coolant and one or more plasma tubes may be arranged within an opening of the C-shaped magnetic core between the ends of the C-shaped magnetic core. To generate a plasma in a first tube of the one or more plasma tubes, a gas may be inserted into the first tube while the RF source drives a coil surrounding a portion of the C-shaped magnetic core to couple electromagnetic energy into the gas within the first tube.
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