LEAK CHECK SYSTEM AND METHOD OF CHECKING LEAK USING THE SAME
摘要:
A leak check system is provided, which supplies air to inspection target space that an object to be inspected has and checks leak based on a pressure change of inspection target space. System includes pedestal, robotic arm including plurality of arm bodies serially coupled from pedestal, robot control device configured to control operation of robotic arm, air supply hand, having air discharge part connected to object to be inspected to discharge air into inspection target space, and attachably and detachably attached to a tip-end part of robotic arm, air supply source, air supply pipe configured to lead air from air supply source to air discharge part, pressure sensor, provided to air supply pipe, and configured to send detected pressure data to robot control device, and air supply mechanism of which supply of air from air supply source to air discharge part is controlled by robot control device.
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