Invention Application
- Patent Title: CALIBRATION OF A SPECTRAL ANALYSIS MODULE
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Application No.: US15362033Application Date: 2016-11-28
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Publication No.: US20180149522A1Publication Date: 2018-05-31
- Inventor: Zhongquan Zhao
- Applicant: Cymer, LLC
- Main IPC: G01J3/50
- IPC: G01J3/50 ; G01N21/31 ; G01N21/33 ; G03F7/20

Abstract:
An apparatus includes a material having an optical transition profile with a known energy transition; and a detector configured to detect a characteristic associated with the interaction between the material and the testing light beam. The testing light beam is either a primary light beam produced by an optical source or a calibration light beam. The apparatus also includes a spectral analysis module placed in a path of the primary light beam; and a control system connected to the detector and to the spectral detection system. The control system is configured to determine a reference spectral profile of the primary light beam based on the detected characteristic; compare the reference spectral profile of the primary light beam with a sensed spectral profile of the primary light beam output from the spectral detection system; and based on this comparison, adjust a scale of the spectral detection system.
Public/Granted literature
- US09983060B1 Calibration of a spectral analysis module Public/Granted day:2018-05-29
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