- 专利标题: CALIBRATION OF A SPECTRAL ANALYSIS MODULE
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申请号: US15362033申请日: 2016-11-28
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公开(公告)号: US20180149522A1公开(公告)日: 2018-05-31
- 发明人: Zhongquan Zhao
- 申请人: Cymer, LLC
- 主分类号: G01J3/50
- IPC分类号: G01J3/50 ; G01N21/31 ; G01N21/33 ; G03F7/20
摘要:
An apparatus includes a material having an optical transition profile with a known energy transition; and a detector configured to detect a characteristic associated with the interaction between the material and the testing light beam. The testing light beam is either a primary light beam produced by an optical source or a calibration light beam. The apparatus also includes a spectral analysis module placed in a path of the primary light beam; and a control system connected to the detector and to the spectral detection system. The control system is configured to determine a reference spectral profile of the primary light beam based on the detected characteristic; compare the reference spectral profile of the primary light beam with a sensed spectral profile of the primary light beam output from the spectral detection system; and based on this comparison, adjust a scale of the spectral detection system.
公开/授权文献
- US09983060B1 Calibration of a spectral analysis module 公开/授权日:2018-05-29
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