A flexible multilayer scattering substrate is disclosed. Built on a flexible supporting layer, the multilayer contains one or more scattering layers and other functional layers so that it can extract the trapped light in substrate and waveguide of an OLED. The processing of each layer is fully compatible with large area, flexible OLED manufactory, and by controlling processing conditions of each incorporated layer, the substrate microstructure can be tuned. Topographic features can be created on the top surface of substrate by changing the thickness and properties of the multilayer.