- 专利标题: ELASTIC WAVE DEVICE WITH SUB-WAVELENGTH THICK PIEZOELECTRIC LAYER
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申请号: US15787568申请日: 2017-10-18
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公开(公告)号: US20180159494A1公开(公告)日: 2018-06-07
- 发明人: Rei Goto , Jie Zou , Hiroyuki Nakamura , Chun Sing Lam
- 申请人: Skyworks Solutions, Inc.
- 主分类号: H03H9/02
- IPC分类号: H03H9/02 ; H03H9/64 ; H03H9/72 ; H01L41/047
摘要:
Aspects of this disclosure relate to an elastic wave device. The elastic wave device includes a sub-wavelength thick piezoelectric layer, an interdigital transducer electrode on the piezoelectric layer, and a high velocity layer with a higher bulk velocity than the velocity of an elastic wave.