- 专利标题: MASK FRAME ASSEMBLY AND EVAPORATION APPARATUS
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申请号: US15737220申请日: 2017-05-12
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公开(公告)号: US20180196343A1公开(公告)日: 2018-07-12
- 发明人: Fengli JI , Shanshan BAI , Yinan LIANG
- 申请人: BOE TECHNOLOGY GROUP CO., LTD. , ORDOS YUANSHENG OPTOELECTRONICS CO., LTD.
- 优先权: CN201610320002.8 20160513
- 国际申请: PCT/CN2017/084112 WO 20170512
- 主分类号: G03F1/42
- IPC分类号: G03F1/42 ; G03F1/66 ; G03F1/68 ; H01L51/56
摘要:
A mask frame assembly and an evaporation apparatus are disclosed. The mask frame assembly comprises a frame and a mask plate fixed on the frame. The mask frame assembly is provided with alignment marks, which comprise a first alignment hole arranged in the frame and a second alignment hole arranged in the mask plate. The first alignment hole is a through hole; or the first alignment hole is a blind hole, the deepest position at a bottom of the blind hole does not overlap with an orthographic projection of the second alignment hole on the frame. The mask frame assembly effectively solves a problem in which liquid residuals in alignment holes of the frame interfere with alignment.
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