Fet-Type Gas Sensor and Method of Controlling Gas
Abstract:
There is provided a field effect transistor type gas sensor, the gas sensor including a substrate, an oxide film on the substrate, a gate electrode on the oxide film, a body electrode which is disposed on the substrate, a first switch that changes a voltage which is applied to the gate electrode, and a second switch that changes a voltage which is applied to the body electrode. The gate electrode and the first switch are connected with each other through an electrical wire.
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