- 专利标题: DOUBLE-LAYER SYSTEM COMPRISING A PARTIALLY ABSORBING LAYER, AND METHOD AND SPUTTER TARGET FOR PRODUCING SAID LAYER
-
申请号: US15504596申请日: 2015-05-18
-
公开(公告)号: US20180223418A1公开(公告)日: 2018-08-09
- 发明人: Martin SCHLOTT , Albert KASTNER , Markus SCHULTHEIS , Jens WAGNER
- 申请人: Heraeus Deutschland GmbH & Co. KG
- 优先权: DE102014111935.5 20140820
- 国际申请: PCT/EP2015/060883 WO 20150518
- 主分类号: C23C14/34
- IPC分类号: C23C14/34 ; C03C17/36
摘要:
A double-layer system includes a metal layer facing away from a viewer and a coating facing the viewer. In order to make the layer system production process as simple as possible and to provide a sputter deposition method that dispenses entirely with the use of reactive gases in the sputtering atmosphere or requires only a small amount thereof, the coating is in the form of an optically partially absorbing layer which has an absorption coefficient kappa of less than 0.7 at a wavelength of 550 nm and a thickness ranging from 30 to 55 nm.
信息查询
IPC分类: