Invention Application
- Patent Title: MEMS MICROPHONE CHIP TRIMMING METHOD, APPARATUS, MANUFACTURING METHOD AND MICROPHONE
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Application No.: US15772580Application Date: 2015-11-03
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Publication No.: US20180242092A1Publication Date: 2018-08-23
- Inventor: Quanbo Zou , Zhe Wang , Yan Loke
- Applicant: Goertek Inc.
- International Application: PCT/CN2015/093733 WO 20151103
- Main IPC: H04R31/00
- IPC: H04R31/00 ; H04R19/04
Abstract:
A MEMS microphone chip trimming method, apparatus, manufacturing method and microphone are disclosed herein. The method for trimming MEMS microphone chips comprises: detecting a pull-in voltage distribution of MEMS microphone chips on a wafer; providing a mask based on the pull-in voltage distribution; and trimming the MEMS microphone chips on the wafer by using the mask.
Information query
