Embodiments of the present disclosure provide a touch substrate and a fabrication method thereof, and an electronic device. The fabrication method of the touch substrate includes: providing a substrate; and sequentially forming a first touch electrode layer, a first insulating layer, a second touch electrode layer and a second insulating layer on the substrate. The first touch electrode layer includes a first touch electrode, and the second touch electrode layer includes a second touch electrode. The step of forming the first insulating layer and the step of forming the second insulating layer are performed by using a single mask.