- 专利标题： TEMPERATURE MONITORING SYSTEM AND METHOD FOR A SUBSTRATE HEATING FURNACE
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申请号： US15967348申请日： 2018-04-30
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公开(公告)号： US20180259263A1公开(公告)日： 2018-09-13
- 发明人: Xin XIANG , Zhiguang GUO , Benxiang HOU , Yunjie WANG , Fan YANG
- 申请人： BOE TECHNOLOGY GROUP CO., LTD. , HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
- 优先权： CN201710134519.2 20170308
- 主分类号： F27D21/00
- IPC分类号： F27D21/00 ; G01J5/00 ; G01J5/04
摘要：
A temperature monitoring system for a substrate heating furnace includes a temperature monitor, and the temperature monitor is located on a prong of a mechanical arm which is configured to fetch and place a substrate. The temperature monitor is configured to monitor the temperature of the substrate which has been heated by the substrate heating furnace and is located on the prong.
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