- 专利标题: GLASS SUBSTRATE, LAMINATED SUBSTRATE, LAMINATE, AND METHOD FOR PRODUCING SEMICONDUCTOR PACKAGE
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申请号: US16018099申请日: 2018-06-26
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公开(公告)号: US20180305241A1公开(公告)日: 2018-10-25
- 发明人: Shigeki SAWAMURA , Kazutaka Ono , Yu Hanawa
- 申请人: Asahi Glass Company, Limited
- 申请人地址: JP Chiyoda-ku
- 专利权人: Asahi Glass Company, Limited
- 当前专利权人: Asahi Glass Company, Limited
- 当前专利权人地址: JP Chiyoda-ku
- 优先权: JP2015-255887 20151228; JP2016-148677 20160728; JP2016-179816 20160914
- 主分类号: C03C3/087
- IPC分类号: C03C3/087 ; C03C3/083 ; C03C3/085 ; H01L21/683 ; H01L23/00 ; B32B17/00
摘要:
A glass substrate includes, as a glass matrix composition as represented by mole percentage based on oxides, SiO2: 55%-75%, Al2O3: 2%-15%, MgO: 0%-10%, CaO: 0%-10%, SrO: 0%-10%, BaO: 0%-15%, ZrO2: 0%-5%, Na2O: 0%-20%, K2O: 5%-30%, and Li2O: 0%-5.0%. The glass substrate has a total content of alkali metal oxides, as represented by mole percentage based on oxides, of 10%-30%, a value obtained by dividing the total content of alkali metal oxides by the content of SiO2 of 0.50 or smaller, a value obtained by dividing the content of Na2O by a value obtained by subtracting the content of Al2O3 from a total content of Na2O and K2O of 0.90 or smaller, and an average coefficient of thermal expansion α1 at 50° C.-350° C. of 11 ppm/° C.-16 ppm/° C.
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