Invention Application
- Patent Title: CO-PLANAR P-CHANNEL AND N-CHANNEL GALLIUM NITRIDE-BASED TRANSISTORS ON SILICON AND TECHNIQUES FOR FORMING SAME
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Application No.: US15774446Application Date: 2015-12-11
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Publication No.: US20180323106A1Publication Date: 2018-11-08
- Inventor: SANSAPTAK DASGUPTA , HAN WUI THEN , MARKO RADOSAVLJEVIC , SANAZ GARDNER , SEUNG HOON SUNG
- Applicant: INTEL CORPORATION
- Applicant Address: US CA Santa Clara
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: US CA Santa Clara
- International Application: PCT/US2015/065291 WO 20151211
- Main IPC: H01L21/8258
- IPC: H01L21/8258 ; H01L27/06 ; H01L27/085

Abstract:
Techniques are disclosed for fabricating co-planar p-channel and n-channel gallium nitride (GaN)-based transistors on silicon (Si). In accordance with some embodiments, a Si substrate may be patterned with recessed trenches located under corresponding openings formed in a dielectric layer over the substrate. Within each recessed trench, a stack including a buffer layer, a GaN or indium gallium nitride (InGaN) layer, and a polarization layer may be selectively formed, in accordance with some embodiments. The p-channel stack further may include another GaN or InGaN layer over its polarization layer, with source/drain (S/D) portions adjacent the m-plane or a-plane sidewalls of that GaN or InGaN layer. The n-channel may include S/D portions over its GaN or InGaN layer, within its polarization layer, in accordance with some embodiments. Gate stack placement can be customized to provide any desired combination of enhancement and depletion modes for the resultant neighboring p-channel and n-channel transistor devices.
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