- 专利标题: COPLANAR ELECTRODE PHOTODIODE ARRAY AND MANUFACTURING METHOD THEREOF
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申请号: US15580848申请日: 2016-08-31
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公开(公告)号: US20180342542A1公开(公告)日: 2018-11-29
- 发明人: Lan ZHANG , Yuanjing LI , Yinong LIU , Haifan HU , Jun LI
- 申请人: Nuctech Company Limited
- 优先权: CN201511010038.8 20151229
- 国际申请: PCT/CN2016/097517 WO 20160831
- 主分类号: H01L27/144
- IPC分类号: H01L27/144 ; H01L31/0224 ; H01L31/18 ; H01L31/0352
摘要:
A coplanar electrode photodiode array and a manufacturing method thereof are disclosed. On a top side of a low resistance rate substrate, a high resistance epitaxial silicon wafer, a first conductive type heavily doped region and a second conductive type doped region are formed, which are a cathode and an anode of a photodiode respectively. The structure includes a trench structure formed between the anode and the cathode, the trench structure may be form by a gap, an insulating material, a conductive structure, a reflective material, and ion implantation, and also includes a first conductive type heavily doped region, an insulating isolation layer or a conductive structure with an insulating layer, and the like formed under the anode and the cathode.