发明申请
- 专利标题: CONVEYANCE SYSTEM
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申请号: US15780680申请日: 2016-10-13
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公开(公告)号: US20180350646A1公开(公告)日: 2018-12-06
- 发明人: Osamu HONDA , Keiji YAMADA , Daisuke ONO , Takashi NOZAWA
- 申请人: MURATA MACHINERY, LTD.
- 优先权: JP2015-239615 20151208
- 国际申请: PCT/JP2016/080412 WO 20161013
- 主分类号: H01L21/677
- IPC分类号: H01L21/677
摘要:
A conveyance system includes a track, ceiling conveyance vehicles, storage apparatuses, and a conveyance controller configured or programmed to control operations of the ceiling conveyance vehicles and a local vehicle in accordance with an operation mode. The storage apparatus includes a storage plate and the local vehicle that transfer a FOUP between the storage plate and an apparatus port. The conveyance controller switches the operation mode among a first mode prohibiting transfer from the apparatus port to the storage plate by the local vehicle, a second mode prohibiting transfer to the storage plate by any of the ceiling conveyance vehicles and transfer from the storage plate to the apparatus port by the local vehicle, and a third mode that does not restrict transfer by the local vehicle.
公开/授权文献
- US10354902B2 Conveyance system 公开/授权日:2019-07-16
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