- 专利标题： HARD COATING, HARD-COATED MEMBER AND ITS PRODUCTION METHOD, AND TARGET FOR PRODUCING HARD COATING AND ITS PRODUCTION METHOD
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申请号： US15775533申请日： 2016-11-04
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公开(公告)号： US20180355471A1公开(公告)日： 2018-12-13
- 发明人: Ryoutarou Fuwa , Kazuyuki Kubota , Yuuzoh Fukunaga
- 申请人： Mitsubishi Hitachi Tool Engineering, Ltd.
- 优先权： JP2015-235672 20151202
- 国际申请： PCT/JP2016/082794 WO 20161104
- 主分类号： C23C14/32
- IPC分类号： C23C14/32 ; C23C30/00 ; C23C14/06 ; C23C14/02
摘要：
A hard coating having a composition represented by (AlxTiyMz)aN(1-a-b)Ob, wherein M is at least one element of Cr and Nb, and x, y, z, a and b are numbers meeting by atomic ratio 0.6≤x≤0.8, 0.05≤y≤0.38, 0.02≤z≤0.2, x+y+z=1, 0.2≤a≤0.8, and 0.02≤b≤0.10, respectively, having M-O bonds without Al—O bonds exceeding an inevitable impurity level as a bonding state identified by X-ray photoelectron spectroscopy, and having only an NaCl-type structure in its X-ray diffraction pattern.
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