发明申请
- 专利标题: LASER APPARATUS
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申请号: US16123328申请日: 2018-09-06
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公开(公告)号: US20190006814A1公开(公告)日: 2019-01-03
- 发明人: Hirotaka MIYAMOTO
- 申请人: Gigaphoton Inc.
- 申请人地址: JP Tochigi
- 专利权人: Gigaphoton Inc.
- 当前专利权人: Gigaphoton Inc.
- 当前专利权人地址: JP Tochigi
- 主分类号: H01S3/1055
- IPC分类号: H01S3/1055 ; H01S3/038 ; H01S5/00 ; G03F7/20
摘要:
A laser apparatus includes: a laser chamber in which a pair of discharge electrodes is provided; a first beam expander configured to expand a beam width of a beam outputted from the laser chamber at least in a first direction substantially parallel to a direction of electric discharge between the discharge electrodes; and a line narrow optical system including: a second beam expander configured to expand a beam width of the beam outputted from the laser chamber at least in a second direction substantially perpendicular to the first direction, the second beam expander including at least one optical element and a grating configured to perform wavelength dispersion of the beam expanded by the first and second beam expanders, the wavelength dispersion being performed in a plane substantially parallel to the second direction, wherein at least one of the grating and the at least one optical element is arranged so as to compensate for wavelength dispersion caused by the first beam expander.
公开/授权文献
- US10522966B2 Laser apparatus 公开/授权日:2019-12-31
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