Invention Application
- Patent Title: NAND Memory Arrays, Devices Comprising Semiconductor Channel Material and Nitrogen, and Methods of Forming NAND Memory Arrays
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Application No.: US15645202Application Date: 2017-07-10
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Publication No.: US20190013404A1Publication Date: 2019-01-10
- Inventor: Chris M. Carlson , Hung-Wei Liu , Jie Li , Dimitrios Pavlopoulos
- Applicant: Micron Technology, Inc.
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/16 ; H01L29/20 ; H01L27/11524 ; H01L27/11556 ; H01L27/1157 ; H01L27/11582 ; H01L21/02 ; H01L29/788 ; H01L29/792

Abstract:
Some embodiments include device having a gate spaced from semiconductor channel material by a dielectric region, and having nitrogen-containing material directly against the semiconductor channel material and on an opposing side of the semiconductor channel material from the dielectric region. Some embodiments include a device having a gate spaced from semiconductor channel material by a dielectric region, and having nitrogen within at least some of the semiconductor channel material. Some embodiments include a NAND memory array which includes a vertical stack of alternating insulative levels and wordline levels. Channel material extends vertically along the stack. Charge-storage material is between the channel material and the wordline levels. Dielectric material is between the channel material and the charge-storage material. Nitrogen is within the channel material. Some embodiments include methods of forming NAND memory arrays.
Public/Granted literature
- US10446681B2 NAND memory arrays, and devices comprising semiconductor channel material and nitrogen Public/Granted day:2019-10-15
Information query
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