Invention Application
- Patent Title: MICROELECTROMECHANICAL TRANSDUCER
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Application No.: US16031722Application Date: 2018-07-10
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Publication No.: US20190016588A1Publication Date: 2019-01-17
- Inventor: Christian Bretthauer , Alfons Dehe , Alfred Sigl
- Applicant: Infineon Technologies AG
- Priority: DE102017115923.1 20170714
- Main IPC: B81B3/00
- IPC: B81B3/00 ; H04R19/00 ; H04R17/02 ; H04R19/02 ; H04R19/04 ; B81B7/02 ; B81C1/00

Abstract:
In accordance with an embodiment, a microelectromechanical transducer includes a displaceable membrane having an undulated section comprising at least one undulation trough and at least one undulation peak and a plurality of piezoelectric unit cells. At least one piezoelectric unit cell is provided in each case in at least one undulation trough and at least one undulation peak, where each piezoelectric unit cell has a piezoelectric layer and at least one electrode in electrical contact with the piezoelectric layer. The membrane may be formed as a planar component having a substantially larger extent in a first and a second spatial direction, which are orthogonal to one another, than in a third spatial direction, which is orthogonal to the first and the second spatial direction and defines an axial direction of the membrane.
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