Invention Application
- Patent Title: METHOD OF SIMULTANEOUS FABRICATION OF SOI TRANSISTORS AND OF TRANSISTORS ON BULK SUBSTRATE
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Application No.: US16046683Application Date: 2018-07-26
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Publication No.: US20190035784A1Publication Date: 2019-01-31
- Inventor: Franck JULIEN
- Applicant: STMICROELECTRONICS (ROUSSET) SAS
- Priority: FR1757144 20170727
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L27/12 ; H01L21/84 ; H01L21/8236

Abstract:
The disclosure relates to a method of simultaneous fabrication of an MOS transistor of SOI type, and of first and second transistors on bulk substrate, comprising: a) providing a semiconductor layer on an insulating layer covering a semiconductor substrate; b) forming a mask comprising, above the location of the second transistor, a central opening which is less wide than the second transistor to be formed; c) plumb with the opening, entirely etching the semiconductor layer and insulating layer, hence resulting in remaining portions of the insulating layer at the location of the second transistor; d) growing the semiconductor by epitaxy as far as the upper level of the semiconductor layer; e) forming isolating trenches; and f) forming the gate insulators of the transistors, the gate insulator of the second transistor comprising at least one part of the said remaining portions of the insulating layer.
Public/Granted literature
- US10777552B2 Method of simultaneous fabrication of SOI transistors and of transistors on bulk substrate Public/Granted day:2020-09-15
Information query
IPC分类: