IMMERSION MATRIX, ITS USE AND IMMERSION DEVICE
摘要:
The invention relates to an immersion matrix (5), designed for adjusting optical properties at interfaces of optical arrangements, having a porosity with pores of at least one pore size selected from a range from >20 nm to 200 μm and/or nanopores in the material of the immersion matrix (5), wherein the nanopores have at least one average pore size selected from a range of 0.5 nm to 20 nm, and an elasticity modulus E selected from a range of 0.1-100 MPa. The invention furthermore relates to the use of the immersion matrix (5), an arrangement with the immersion matrix and an immersion device.
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