- 专利标题: IMMERSION MATRIX, ITS USE AND IMMERSION DEVICE
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申请号: US16144839申请日: 2018-09-27
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公开(公告)号: US20190094512A1公开(公告)日: 2019-03-28
- 发明人: Thomas Ohrt , Thomas Kalkbrenner
- 申请人: CARL ZEISS MICROSCOPY GMBH
- 优先权: DE102017217192.8 20170927
- 主分类号: G02B21/33
- IPC分类号: G02B21/33 ; G02B21/02 ; G02B27/00 ; G01N21/15
摘要:
The invention relates to an immersion matrix (5), designed for adjusting optical properties at interfaces of optical arrangements, having a porosity with pores of at least one pore size selected from a range from >20 nm to 200 μm and/or nanopores in the material of the immersion matrix (5), wherein the nanopores have at least one average pore size selected from a range of 0.5 nm to 20 nm, and an elasticity modulus E selected from a range of 0.1-100 MPa. The invention furthermore relates to the use of the immersion matrix (5), an arrangement with the immersion matrix and an immersion device.
公开/授权文献
- US11119301B2 Immersion matrix, its use and immersion device 公开/授权日:2021-09-14
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