- 专利标题: Micro Devices Formed by Flex Circuit Substrates
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申请号: US16143677申请日: 2018-09-27
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公开(公告)号: US20190104616A1公开(公告)日: 2019-04-04
- 发明人: Stephen A. Marsh
- 申请人: Stephen A. Marsh
- 申请人地址: US MA Burlington
- 专利权人: Encite LLC
- 当前专利权人: Encite LLC
- 当前专利权人地址: US MA Burlington
- 主分类号: H05K1/18
- IPC分类号: H05K1/18 ; B81C1/00 ; B81B3/00 ; H05K1/03
摘要:
Disclosed is a flexible electronic circuit substrate that includes a device that is fabricated from layers of the flexible electronic circuit substrate as part of construction of the flexible electronic circuit substrate. Such devices could be functional units such as micro electro mechanical devices (MEMS) devices such as micro-accelerometer sensor elements, micro flow sensors, micro pressure sensors, etc.
公开/授权文献
- US10512164B2 Micro devices formed by flex circuit substrates 公开/授权日:2019-12-17