Invention Application
- Patent Title: METHOD OF DEPOSITING ELECTRODES AND ELECTROLYTE ON MICROELECTROMECHANICAL SYSTEM ELECTROCHEMICAL SENSORS
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Application No.: US16174577Application Date: 2018-10-30
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Publication No.: US20190128835A1Publication Date: 2019-05-02
- Inventor: Keith Francis Edwin PRATT , Cristian Vasile DIACONU , Yong-Fa WANG
- Applicant: HONEYWELL INTERNATIONAL INC.
- Priority: EP17199488.2 20171031
- Main IPC: G01N27/407
- IPC: G01N27/407 ; B81B7/00 ; B81C1/00

Abstract:
Embodiments relate generally to systems, devices, and methods for depositing an electrode and an electrolyte on a microelectromechanical system (MEMS) electrochemical sensor. A method may comprise providing a blade on a surface of a substrate; providing a ridge along the perimeter of the substrate; pressing the electrode and the electrolyte onto the blade and the ridge; cutting the electrode into multiple electrodes; positioning the electrolyte to contact the surface, the blade, and the ridge; and positioning the multiple electrodes to contact the surface, the blade, and the ridge.
Public/Granted literature
- US11169110B2 Method of depositing electrodes and electrolyte on microelectromechanical system electrochemical sensors Public/Granted day:2021-11-09
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