- 专利标题: THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE
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申请号: US16018199申请日: 2018-06-26
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公开(公告)号: US20190139979A1公开(公告)日: 2019-05-09
- 发明人: KOHJI KANAMORI , Seo-Goo Kang , Younghwan Son , Kwonsoon Jo
- 申请人: SAMSUNG ELECTRONICS CO., LTD.
- 优先权: KR10-2017-0147522 20171107
- 主分类号: H01L27/11582
- IPC分类号: H01L27/11582 ; H01L27/11573 ; H01L27/1157 ; G11C8/14
摘要:
A three-dimensional semiconductor memory device includes a peripheral logic structure on a semiconductor substrate. A horizontal semiconductor layer is on the peripheral logic structure and includes a cell array region and a connection region. Electrode structures extend in a first direction on the horizontal semiconductor layer and are spaced apart in a second direction intersecting the first direction. A pair of the electrode structures adjacent to each other are symmetrically disposed to define a contact region partially exposing the horizontal semiconductor layer. A through via structure is on the contact region and connects the electrode structures to the peripheral logic structure. Each of the electrode structures includes a plurality of gate insulation regions extending along the first direction on the connection region. The gate insulation regions have different lengths from each other in the first direction.
公开/授权文献
- US10566345B2 Three-dimensional semiconductor memory device 公开/授权日:2020-02-18
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