Invention Application
- Patent Title: TIN-CONTAINING DOPANT COMPOSITIONS, SYSTEMS AND METHODS FOR USE IN ION IMPLANTATION SYSTEMS
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Application No.: US16248952Application Date: 2019-01-16
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Publication No.: US20190144471A1Publication Date: 2019-05-16
- Inventor: Aaron Reinicker , Ashwini K. Sinha , Qiong Guo
- Applicant: Aaron Reinicker , Ashwini K. Sinha , Qiong Guo
- Main IPC: C07F7/22
- IPC: C07F7/22 ; H01J37/317 ; C23C14/48 ; C09D5/24 ; H01L21/265

Abstract:
A novel method and system for using certain tin compounds as dopant sources for ion implantation are provided. A suitable tin-containing dopant source material is selected based on certain attributes. Some of these attributes include stability at room temperature; sufficient vapor pressure to be delivered from its source supply to an ion chamber and, the ability to produce a suitable beam current for ion implantation to achieve the required implant Sn dosage.
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