发明申请
- 专利标题: LASER DEVICE
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申请号: US16266279申请日: 2019-02-04
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公开(公告)号: US20190173258A1公开(公告)日: 2019-06-06
- 发明人: Hirotaka MIYAMOTO , Osamu WAKABAYASHI
- 申请人: Gigaphoton Inc.
- 申请人地址: JP Tochigi
- 专利权人: Gigaphoton Inc.
- 当前专利权人: Gigaphoton Inc.
- 当前专利权人地址: JP Tochigi
- 主分类号: H01S3/08
- IPC分类号: H01S3/08 ; H01S3/03
摘要:
Provided is a laser device that includes a laser chamber in which a pair of discharge electrodes are disposed; a line narrowing optical system including a grating disposed in a position outside the laser chamber; a beam expander optical system that increases a diameter of a light beam, outputted from the laser chamber and traveling toward the grating, in a first direction parallel to a discharge direction between the discharge electrodes and in a second direction orthogonal to the discharge direction; and a holding platform that is formed as a component separate from the laser chamber and the grating, holds the beam expander optical system, and forms along with the beam expander optical system a beam expander unit.
公开/授权文献
- US10965087B2 Laser device 公开/授权日:2021-03-30