Invention Application
- Patent Title: A P-TYPE THIN-FILM TRANSISTOR AND MANUFACTURING METHOD FOR THE SAME
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Application No.: US16045125Application Date: 2018-07-25
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Publication No.: US20190214503A1Publication Date: 2019-07-11
- Inventor: MingJiue YU , YuanJun HSU
- Applicant: SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Priority: CN201810016577.X 20180108
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/417 ; H01L29/423 ; H01L29/66 ; H01L23/532 ; H01L21/02 ; H01L21/48

Abstract:
A P-type thin-film transistor and manufacturing method are provided. The method includes: forming an active layer having a P-type material on a buffering layer; forming a gate insulation layer on the active layer; depositing a gate metal layer on the gate insulation layer; forming a photoresist layer on the gate metal layer, and patterning the photoresist layer; etching the gate metal layer to form a gate electrode such that a projection of the gate electrode is within the patterned photoresist layer; using the patterned photoresist layer as a barrier layer to etch the gate insulation layer such that a projection of the gate electrode is within the gate insulation layer, and a projection of the gate insulation layer is within the active layer; doping two side regions of the active layer located below the gate insulation layer; and forming a source electrode and drain electrode on the doped regions.
Information query
IPC分类: