发明申请
- 专利标题: VIBRATION ISOLATION SYSTEM
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申请号: US16233428申请日: 2018-12-27
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公开(公告)号: US20190234478A1公开(公告)日: 2019-08-01
- 发明人: Emil KRANER , Antonio Lopes , Justin Nealey
- 申请人: Technical Manufacturing Corporation
- 申请人地址: US MA Peabody
- 专利权人: Technical Manufacturing Corporation
- 当前专利权人: Technical Manufacturing Corporation
- 当前专利权人地址: US MA Peabody
- 主分类号: F16F7/10
- IPC分类号: F16F7/10
摘要:
Apparatus and methods to reduce unwanted motion in a payload of a precision instrument are described. The payload may be supported by an intermediate mass. A feedback signal based upon sensed motion of the intermediate mass may be applied to an intermediate-mass actuator arranged to drive the intermediate mass. Additionally, a feedforward signal may be applied to a payload actuator arranged to drive the payload and used to suppress unwanted motion of the payload. The feedforward signal may be derived from a source within the apparatus or external to the apparatus that would otherwise cause unwanted motion of the payload.
公开/授权文献
- US10808790B2 Vibration isolation system 公开/授权日:2020-10-20
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