- 专利标题: Ion Milling Apparatus and Sample Holder
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申请号: US16299632申请日: 2019-03-12
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公开(公告)号: US20190287755A1公开(公告)日: 2019-09-19
- 发明人: Shogo Kataoka , Toru Kagawa
- 申请人: JEOL Ltd.
- 优先权: JP2018-045981 20180313
- 主分类号: H01J37/20
- IPC分类号: H01J37/20 ; H01J37/305 ; H01J37/26
摘要:
There is provided an ion milling apparatus and sample holder permitting one to observe a sample, which has been milled, with an electron microscope without transferring the sample to a different holding member. The ion milling apparatus has an ion source, a sample holder, and a sample stage. The sample holder includes: a holder body having a sample holding portion for holding the sample; and a cover member detachably mounted to the holder body and hermetically sealing the sample held on the sample holding portion. The holder body has a shield plate and a field-correcting plate for correcting electric fields around the sample held on the sample holding portion.
公开/授权文献
- US10832888B2 Ion milling apparatus and sample holder 公开/授权日:2020-11-10
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