A method of making an adhesive article includes providing a liner having first and second silicone release layer disposed on opposite sides thereof, applying the onium salt photoacid generator onto at least a portion of the first silicone release layer to provide a modified silicone release layer, disposing an adhesive layer onto the second silicone release layer, and and exposing at least the adhesive layer to electron beam radiation within a process chamber thereby providing a crosslinked adhesive layer, wherein the process chamber contains oxygen, wherein the modified silicone release layer is exposed to the oxygen during crosslinking of the adhesive layer. The first silicone release layer does not contain an onium salt photoacid generator. An adhesive article made by the method is also disclosed.