- 专利标题: Organic vapor jet print head with redundant groups of depositors
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申请号: US16400218申请日: 2019-05-01
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公开(公告)号: US20190386216A1公开(公告)日: 2019-12-19
- 发明人: William E. QUINN , Gregory MCGRAW , Gregg KOTTAS , Xin XU , Julia J. BROWN
- 申请人: Universal Display Corporation
- 主分类号: H01L51/00
- IPC分类号: H01L51/00 ; B05B12/18 ; H01L51/50 ; H01L51/56
摘要:
Embodiments of the disclosed subject matter provide a device including a micronozzle array having separate redundant groups of depositors that each include a delivery aperture disposed between two exhaust apertures. The device may include a first row of depositors of a first redundant group, each of which may be connected in parallel to first common delivery lines and first common exhaust lines. The device may include a second row of depositors of a second redundant group, each of which is connected in parallel to second common delivery and second common exhaust lines. The first row of depositors and the second row of depositors may operate independently from one another. The device may be disposed within a deposition chamber and in proximity of a substrate.
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