- 专利标题: THIN FILM TRANSISTOR, ARRAY SUBSTRATE, DISPLAY PANEL AND METHOD FOR MANUFACTURING THIN FILM TRANSISTOR
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申请号: US16397386申请日: 2019-04-29
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公开(公告)号: US20200013867A1公开(公告)日: 2020-01-09
- 发明人: Tongshang SU , Dongfang Wang , Ce Zhao , Bin Zhou , Liangchen Yan
- 申请人: Hefei Xinsheng Optoelectronics Technology Co., Ltd. , Boe Technology Group Co., Ltd.
- 优先权: CN201810717745.8 20180703
- 主分类号: H01L29/45
- IPC分类号: H01L29/45 ; H01L27/12 ; H01L29/24 ; H01L29/786 ; H01L21/02 ; H01L21/441 ; H01L21/467 ; H01L21/4763 ; H01L29/66 ; G03F7/16 ; G03F7/20 ; G03F7/26
摘要:
The present disclosure provides a thin film transistor, including a base substrate, an active layer and a source/drain, and a conductive layer. The active layer and an outer edge of the conductive layer are formed in the same etching process. The present disclosure further provides a method for manufacturing a thin film transistor, including forming an active material layer and a conductive material layer, forming a photoresist on the conductive material layer, exposing and developing the photoresist by means of a halftone mask, removing segments of the active material layer and the conductive material layer corresponding to a photoresist completely-removed region by a same etching process, partially removing the photoresist in a photoresist completely-retained region and completely removing the photoresist in a photoresist partially-retained region, and removing a segment of the conductive material layer corresponding to the photoresist partially-retained region.
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