Embodiments of the present disclosure provide a device and a method for detecting breakage of a substrate and a substrate transfer system. The device includes a first electrode and a second electrode arranged oppositely, a power source, and a detector. The power source may provide an alternating current voltage to the first electrode and the second electrode. The detector is arranged between the power source and the first electrode or the second electrode and may detect, when the substrate is placed between the first electrode and the second electrode, a current value in the substrate, and determine whether the substrate is damaged based on the detected current value.