A heater-integrated filter includes: a casing in which are formed an intake port for taking in a portion of process gas from a compressor and a discharge port for discharging the process gas; a filter body which is provided inside the casing and through which the process gas from the intake port passes; and rod-like heaters which are disposed inside the casing and along which the process gas that has passed through the filter body is capable of flowing toward the discharge port along the extension direction.