Invention Application
- Patent Title: Advanced Sputter Targets For Ion Generation
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Application No.: US16191526Application Date: 2018-11-15
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Publication No.: US20200157675A1Publication Date: 2020-05-21
- Inventor: Graham Wright , Klaus Becker
- Applicant: APPLIED Materials, Inc.
- Main IPC: C23C14/34
- IPC: C23C14/34 ; H01J37/34

Abstract:
An advanced sputter target is disclosed. The advanced sputter target comprises two components, a porous carrier, and a metal material disposed within that porous carrier. The porous carrier is designed to be a high porosity, open cell structure such that molten material may flow through the carrier. The porous carrier also provides structural support for the metal material. The cell sizes of the porous carrier are dimensioned such that the capillary action and surface tension prohibits the metal material from spilling, dripping, or otherwise exiting the porous carrier. In some embodiments, the porous carrier is an open cell foam, a weave of strands or stacked meshes.
Public/Granted literature
- US11008649B2 Advanced sputter targets for ion generation Public/Granted day:2021-05-18
Information query
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