Invention Application
- Patent Title: CVI/CVD MATRIX DENSIFICATION PROCESS AND APPARATUS
-
Application No.: US16192286Application Date: 2018-11-15
-
Publication No.: US20200157679A1Publication Date: 2020-05-21
- Inventor: Ying She , Cristal Chan
- Applicant: United Technologies Corporation
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C16/52

Abstract:
A chemical vapor infiltration and deposition (CVI/CVD) reactor assembly includes a CVI/CVD reactor and a reactant gas feed source. The CVI/CVD reactor includes a first inlet at a first end of the CVI/CVD reactor, a second inlet at a second end of the CVI/CVD reactor opposite the first end, a first outlet at the second end, a second outlet at the first end, and a chamber in fluid communication with the first and second inlets and first and second outlets and configured to hold a substrate. The reactant gas feed source is interchangeably and fluidly connected to the first and second inlets by first and second valved gas lines, respectively.
Information query
IPC分类: