Invention Application
- Patent Title: SYSTEM AND METHOD FOR DETECTING THE CONCENTRATION OF METAL PARTICLES
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Application No.: US16685618Application Date: 2019-11-15
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Publication No.: US20200158710A1Publication Date: 2020-05-21
- Inventor: Massimo Cataldo MAZZILLO , Antonella SCIUTO
- Applicant: STMICROELECTRONICS S.R.L.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@442d507c
- Main IPC: G01N33/20
- IPC: G01N33/20 ; G01N27/414 ; H01L29/872

Abstract:
A system for detecting the concentration of metal particles of at least one first material, which includes a detector with: a semiconductor body including a cathode region, delimited by a front surface; and an anode structure made of metal material, which extends over a part of the cathode region, leaving part of the front surface exposed. The anode structure and the part of the cathode region form a first contact of a Schottky type. The exposed part of the front surface can access the metal particles.
Public/Granted literature
- US11821886B2 System and method for detecting the concentration of metal particles Public/Granted day:2023-11-21
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