Invention Application
- Patent Title: RESONANT SENSOR DEVICE
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Application No.: US16693485Application Date: 2019-11-25
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Publication No.: US20200166538A1Publication Date: 2020-05-28
- Inventor: Shigeto IWAI , Makoto NORO
- Applicant: Yokogawa Electric Corporation
- Applicant Address: JP Tokyo
- Assignee: Yokogawa Electric Corporation
- Current Assignee: Yokogawa Electric Corporation
- Current Assignee Address: JP Tokyo
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@5f11bfb5
- Main IPC: G01P15/097
- IPC: G01P15/097

Abstract:
A resonant sensor device includes a base and a detection substrate. The detection substrate includes a movable portion configured to move in a first direction, a supporter includes one or more supporting portions which extend in a direction along an intersecting plane intersecting the first direction, an intermediate fixing portion which is connected to the movable portion via the supporter, a connection portion which connects a mounting portion fixed to the base to the intermediate fixing portion in a second direction that is one direction along the intersecting plane, and a resonator at least partially embedded in the one or more supporting portions. The maximum dimension of the connection portion in a third direction orthogonal to the second direction in the intersecting plane is smaller than a maximum dimension of the supporter in the third direction.
Public/Granted literature
- US10955434B2 Resonant sensor device Public/Granted day:2021-03-23
Information query
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