A CLEAR-OUT TOOL, A LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD
Abstract:
A clear-out tool is described, the clear-out tool being configured to at least partially remove a masking layer from a target area of an object using a laser beam. The clear-out tool includes a barrier member configured to be arranged above a surface of the object containing the target area and configured to contain a liquid in a space next to the target area or surrounding the target area.
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