Invention Application
- Patent Title: Apparatus and Method for Generating a Non-Thermal Atmospheric Pressure Plasma
-
Application No.: US16084192Application Date: 2017-01-25
-
Publication No.: US20200187343A1Publication Date: 2020-06-11
- Inventor: Michael Weilguni , Pavol Kudela
- Applicant: EPCOS AG
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@23781654
- International Application: PCT/EP2017/051559 WO 20170125
- Main IPC: H05H1/24
- IPC: H05H1/24 ; H01L41/04 ; H01L41/107

Abstract:
An apparatus and a method for generating a non-thermal atmospheric pressure plasma are disclosed. In an embodiment, an apparatus for generating a non-thermal atmospheric-pressure plasma includes a first piezoelectric transformer, a second piezoelectric transformer, and a drive circuit configured to apply an input voltage to each of the piezoelectric transformers, and wherein the input voltage applied to the first transformer is phase-shifted by 90° in relation to the input voltage applied to the second transformer.
Public/Granted literature
- US11076475B2 Apparatus and method for generating a non-thermal atmospheric pressure plasma Public/Granted day:2021-07-27
Information query
IPC分类: