• Patent Title: Apparatus and Method for Generating a Non-Thermal Atmospheric Pressure Plasma
  • Application No.: US16084192
    Application Date: 2017-01-25
  • Publication No.: US20200187343A1
    Publication Date: 2020-06-11
  • Inventor: Michael WeilguniPavol Kudela
  • Applicant: EPCOS AG
  • Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@23781654
  • International Application: PCT/EP2017/051559 WO 20170125
  • Main IPC: H05H1/24
  • IPC: H05H1/24 H01L41/04 H01L41/107
Apparatus and Method for Generating a Non-Thermal Atmospheric Pressure Plasma
Abstract:
An apparatus and a method for generating a non-thermal atmospheric pressure plasma are disclosed. In an embodiment, an apparatus for generating a non-thermal atmospheric-pressure plasma includes a first piezoelectric transformer, a second piezoelectric transformer, and a drive circuit configured to apply an input voltage to each of the piezoelectric transformers, and wherein the input voltage applied to the first transformer is phase-shifted by 90° in relation to the input voltage applied to the second transformer.
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