- 专利标题: METHOD OF DEFECT DETECTION ON A SPECIMEN AND SYSTEM THEREOF
-
申请号: US16249857申请日: 2019-01-16
-
公开(公告)号: US20200226744A1公开(公告)日: 2020-07-16
- 发明人: Elad COHEN , Denis SIMAKOV
- 申请人: Elad COHEN , Denis SIMAKOV
- 主分类号: G06T7/00
- IPC分类号: G06T7/00
摘要:
There are provided a system and method of defect detection on a specimen, the method comprising: performing partitioning for each of one or more portions of a first die; receiving one or more noise maps indicative of noise distribution on second images captured for one or more portions of a second die; performing segmentation for each noise map in runtime, the segmentation for a given noise map including: calculating a score for each region, the given noise map aligned with the regions and each region is associated with noise data aligned therein, the score for a given region calculated at least based on the noise data associated therewith; and associating each region with one segmentation label of a predefined set of segmentation labels indicative of noise levels based on the score, thereby obtaining a set of segments each corresponding to one or more regions associated with the same segmentation label.
公开/授权文献
- US10853932B2 Method of defect detection on a specimen and system thereof 公开/授权日:2020-12-01
信息查询