• Patent Title: EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
  • Application No.: US16849421
    Application Date: 2020-04-15
  • Publication No.: US20200241425A1
    Publication Date: 2020-07-30
  • Inventor: Atsushi UEDA
  • Applicant: Gigaphoton Inc.
  • Applicant Address: JP Tochigi
  • Assignee: Gigaphoton Inc.
  • Current Assignee: Gigaphoton Inc.
  • Current Assignee Address: JP Tochigi
  • Main IPC: G03F7/20
  • IPC: G03F7/20 H05G2/00
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
Abstract:
An extreme ultraviolet light generation apparatus that generates extreme ultraviolet light by irradiating a target with a pulse laser beam includes: a chamber; a magnet that is positioned outside the chamber and forms a magnetic field (70) inside the chamber; a discharge path (37a) that is opened at a position on an inner wall surface of the chamber where the inner wall surface intersects a central axis of the magnetic field (70) and through which gas inside the chamber is discharged; and a gas supply unit (10a) configured to supply gas into the discharge path (37a) through an inner wall surface of the discharge path.
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