An all solid-state lithium-based thin-film battery is provided. The all solid-state lithium-based thin-film battery includes a battery material stack of, from bottom to top, an anode-side electrode, an anode region, an aluminum oxide interfacial layer, a solid-state electrolyte layer, a cathode layer, and a cathode-side electrode layer. The all solid-state lithium-based thin-film battery stack is formed by first forming the anode-side of the battery stack and thereafter forming the cathode-side. All solid-state lithium-based thin-film batteries including the aluminum oxide interfacial layer located between the anode region and the solid-state electrolyte layer have improved performance, high capacity, and high reliability.