发明申请
- 专利标题: Optical Fiber
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申请号: US16838400申请日: 2020-04-02
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公开(公告)号: US20200319400A1公开(公告)日: 2020-10-08
- 发明人: Patrick Sebastian UEBEL , Sebastian Thomas BAUERSCHMIDT , Peter Maximilian GÖTZ
- 申请人: ASML Netherlands B.V.
- 申请人地址: NL Veldhoven
- 专利权人: ASML Netherlands B.V.
- 当前专利权人: ASML Netherlands B.V.
- 当前专利权人地址: NL Veldhoven
- 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@43bdf2d6 com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@17b37c86
- 主分类号: G02B6/02
- IPC分类号: G02B6/02 ; G02B6/44
摘要:
An optical fiber, an apparatus for receiving input radiation and broadening a frequency range, a radiation source, a metrology arrangement and a lithographic apparatus are provided. The optical fiber comprises a hollow core, a cladding portion and a support portion. The cladding portion surrounds the hollow core and comprises a plurality of anti-resonance elements for guiding radiation through the hollow core. The support portion surrounds and supports the cladding portion and comprises an inner support portion, an outer support portion and a deformable connecting portion that connects the inner support portion to the outer support portion.
公开/授权文献
- US11099319B2 Optical fiber 公开/授权日:2021-08-24
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